one of the most advanced technique for phase determination of different kind of material is Reitveld Refinement Method. In this method , peak profile fitting, size broadening and strain broadening were calculated on the basis of following equations. Where G_ik is Pseudo-Voigt function, C₀=2, C₁=4ln2, H_k  is full with at half maximum of the K_th brag reflection, γ is shape parameter, X_ik= (2θi - 2θk)/H_k. D_i, η_i, λ, U and W are grain size function, strain function, wavelength, strain parameter and size parameter of peak profile, respectively. In the size and strain functions, i and STD are referred to analyzed and standard samples, correspondingly.